Bộ điều khiển lưu lượng lớn hiệu suất cao với van ngắt tích hợp FG-201CS Bronkhorst.
EL-FLOW PRESTIGE FG-201CS
High Performance Mass Flow Controller with Integrated Shut-Off Valve
- On-board gas conversion model (Multi-Fluid / Multi-Range)
- 100 unique gases embedded
- User configurable I/O functions
- Integrated shut-off valve for extra efficiency or safety
- Further advances in flow-signal processing
- Highly stable flow control regime virtually impervious to process fluctuations
- Advanced control valve design
Gas Mass Flow Controllers with Electrical Shut-Off Valves
Bronkhorst® model FG-201CS High Performance Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,14…7 mln/min and 0,4…20 ln/min at operating pressures between vacuum and 10 bar. The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. For extra efficiency or safety, the FG-201CS features an integrated, electrically operated shut-off valve.
EL-FLOW® Prestige series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide DeviceNet™, PROFIBUS DP, Modbus, EtherCAT®, PROFINET or FLOW-BUS protocols. The EL-FLOW® Prestige design features standard Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.
Technical specifications
Measurement / control system | |
---|---|
Flow range, based on N2 (intermediate ranges available) |
min. 0,14…7 mln/min max. 0,4…20 ln/min |
Accuracy (incl. linearity) (based on actual calibration) |
±0,5% Rd plus ±0,1%FS |
Repeatability | < 0,2% Rd |
Turndown | 1 : 150; in analog mode 1 : 50 |
Multi Gas/Multi Range | embedded gas data for 100 unique gases, plus any mixture of maximum 5 of these gases. |
Settling time (in control, typical) |
fast: < 500 msec standard: < 1 sec slow: < 2 sec |
Control stability | ≤ ± 0,1% FS (typical for 1 ln/min N2) |
Max. Kv-value | 6,5 x 10-2 |
Operating temperature | -10…70°C |
Temperature sensitivity | zero: < 0,02% FS/°C; span: < 0,025% Rd/°C |
Pressure sensitivity | < 0,15% Rd/bar typical N2; < 0,02% Rd/bar N2 (incl. pressure correction option) |
Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
Attitude sensitivity | max. error at 90º off horizontal 0,07% FS at 1 bar, typical N2 |
Warm-up time | 30 min. for optimum accuracy |
Mechanical parts | |
---|---|
Material (wetted parts) | stainless steel 316L or comparable, degreased for use on oxygen (O2) |
Pressure rating | 10 bar (g) |
Max. ΔP | 5 bar dif. |
Process connections | compression type or face seal couplings |
Seals | standard: Viton® options: EPDM, Kalrez® (FFKM) (N/C shut-off only) |
Weight | 1,3 kg |
Ingress protection (housing) | IP40 |
Electrical properties | |||
---|---|---|---|
Power supply | +15…24 Vdc | ||
Max. power consumption (based on normally closed valve, pin 5 not used) |
Supply 15 V 24 V |
at voltage I/O 202 mA 128 mA |
at current I/O 225 mA 146 mA |
Shut-off valve (N/C) | +24 Vdc, 3 W; using a shut-off control adapter reduces the power consumption | ||
If applicable: PROFIBUS DP | add 53 mA (15 V supply) or 30 mA (24 V supply) | ||
PROFINET | add 76 mA (15 V supply) or 48 mA (24 V supply) | ||
EtherCAT® | add 66 mA (15 V supply) or 41 mA (24 V supply) | ||
DeviceNet™ | add 48 mA (24 V supply) | ||
Analog output/command | 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output) | ||
Digital communication | standard: RS232; options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU or ASCII, FLOW-BUS |
Electrical connection | |
---|---|
Analog/RS232 | 9-pin D-connector (male); |
PROFIBUS DP | bus: 9-pin D-connector (female); power: 9-pin D-connector (male); |
Devicenet™ | 5-pin M12-connector (male); |
EtherCAT®/PROFINET | 2 x RJ45 modular jack (in/out) |
Modbus/FLOW-BUS | RJ45 modular jack |
CE | EMC 2014/30/EU, RoHS 2011/65/EU, |
IEC 61010-1 | 2010 |
Technical specifications subject to change without notice.
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