Bộ điều khiển dòng chảy kín kim loại cho khí F-201CM Bronkhorst Việt Nam

Mã sản phẩm:

F-201CM

Hãng sản xuất:

Bronkhorst

Xuất xứ:

Hà Lan

Liên hệ:

0946452592

Email:

sale01@tmpvietnam.com

Chia sẻ:

Số lượng

Chi tiết sản phẩm

Bộ điều khiển dòng chảy kín kim loại cho khí F-201CM Bronkhorst Việt Nam.

EL-FLOW METAL SEALED F-201CM

Metal Sealed Mass Flow Controller for Gases

Patented metal-to-metal seal construction ensures long-term leak tightness (to atmosphere)
Electropolished wetted parts
Cleanroom asembled
High accuracy, excellent repeatability
Multi Gas / Multi Range functionality (option)
Fast settling time (down to 600 msec)

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EL-FLOW Metal SealedF-201CM

Metal Sealed Gas Mass Flow Controllers

Bronkhorst^® model F-201CM Mass Flow Controllers (MFCs) designed especially to meet the requirements of the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. The F-201CM is suited for precise measurement and control of flow ranges between 0.12…6 sccm up to 1…50 slm (based on N₂) at operating pressures between vacuum and 1000 psig (64 bar).

EL-FLOW^® Metal Sealed series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide DeviceNet™, PROFIBUS DP, Modbus, EtherCAT^®, PROFINET or FLOW-BUS protocols. The EL-FLOW^® Metal Sealed design features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.

Technical specifications

Measurement / control system
Flow range, based on N₂ (intermediate ranges available)	min. 0,12…6 ml_n/min max. 1…50 l_n/min
Accuracy (incl. linearity) (based on actual calibration)	±0,5% Rd plus ±0,1% FS
Repeatability	< 0,2% Rd
Turndown	1 : 50 (in digital mode up to 1 : 150)
Settling time	1 second typical above 5% FS; option: down to 600 msec
Control stability	± 0.05% FS (typical for 1 slm N₂)
Max. operating pressure	1000 psig (64 bar)
Temperature sensitivity	zero: < 0.05% FS/°C; span: < 0.05% Rd/°C
Pressure sensitivity	< 0,1% Rd/bar typical N₂; < 0,01% Rd/bar H₂
Warm-up time	30 min. for optimum accuracy 2 min for accuracy ± 2% FS

General performance
Operating temperature	-10…+70°C (Viton or EPDM valve seat); 0…70°C (NC valve with Kalrez 6375 seat); 0…50°C (NO valve with Kalrez 6375 seat)
Leak integrity (outboard)	< 2 x 10^-11 Pa.m³/s He
Leak-by through closed valve	< 10^-5 Pa.m³/s He
Attitude sensitivity	may be mounted in any position

Mechanical parts
Material (wetted parts)	stainless steel 316L or comparable
Process connections	1/4” face seal male
Seals	Outer seals: metal-to-metal (no rings); Inner seal / valve seat: Kalrez^® (FFKM); options: Viton^®, EPDM
Weight	0,7 kg
Ingress protection (housing)	IP40

Electrical properties
Power supply	+15…24 Vdc
Max. power consumption (controllers based on normally closed valve, pin 5 not used)	Supply 15 V 24 V	at voltage I/O 290 mA 200 mA	at current I/O 320 mA 215 mA
If applicable: PROFIBUS DP	add 53 mA (15 V supply) or 30 mA (24 V supply)
PROFINET	add 77 mA (15 V supply) or 48 mA (24 V supply)
EtherCAT^®	add 66 mA (15 V supply) or 41 mA (24 V supply)
DeviceNet™	add 48 mA (24 V supply)
Analog output/command	0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communication	standard: RS232; options: PROFIBUS DP, DeviceNet™, PROFINET, EtherCAT^®, Modbus RTU or ASCII, FLOW-BUS

Electrical connection
Analog/RS232	9-pin D-connector (male);
PROFIBUS DP	bus: 9-pin D-connector (female); power: 9-pin D-connector (male);
Devicenet™	5-pin M12-connector (male);
EtherCAT^®/PROFINET	2 x RJ45 modular jack (in/out)
Modbus/FLOW-BUS	RJ45 modular jack